Dear Colleagues,

After RSD 2021 in Leipzig had to be cancelled due to Corona, we are happy to cordially invite you to participate in the RSD 2023 in Leipzig, Germany. It is organized by the Leibniz Institute of Surface Engineering (IOM), which is devoted to research tailoring surface properties, including thin film coatings, using plasmas, ions, electrons, and photons.

RSD 2023 is a sequel to a series of successful conferences dedicated to reactive sputter deposition, which were organized starting from 2000 in different countries by different organizations. The main focus is the use of various magnetron sputtering techniques, but RSD 2023 is also open to other sputter deposition processes, such as, for instance, ion beam sputter deposition. Both fundamental aspects and various fields of application are addressed. The conference is steadily growing and brings together young and senior scientists from universities, research institutes, and industry. It is designed to be a place of lively discussions of current and future scientific and technical results or challenges. Therefore, we will do our best to make the RSD 2023 a successful event benefiting all participants and exhibitors.

As in the past, a short course on reactive sputter deposition will be offered by Prof. Diederik Depla, the 'father' of RSD, the day before the conference starts. Please note, participants have to register separately for the short course, and only a limited number can be admitted.

Details regarding registration and abstract submission will be announced by the end of June 2023.

Stay healthy and we hope to see you in December in Leipzig!

Carsten Bundesmann

(Conference Chair)